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Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Engineering)
enlarge	Author: Stephen A. Campbell Publisher: Oxford University Press, USA Category: Book List Price: ~~$89.95~~ Buy New: $70.00 as of 2/9/2012 00:42 CST details You Save: $19.95 (22%) In Stock New (15) Used (17) from $50.00 Seller: Matt Churchman Sales Rank: 345,697 Media: Paperback Edition: 3 Pages: 672 Number Of Items: 1 Shipping Weight (lbs): 2.2 Dimensions (in): 9.2 x 7.5 x 1 ISBN: 0195320174 Dewey Decimal Number: 621.38152 EAN: 9780195320176 ASIN: 0195320174 Publication Date: September 17, 2007 Availability: Usually ships in 1-2 business days Condition: Brand New Book.


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Editorial Reviews: Product Description Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite--the Silvaco Athena� set of codes--to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.