| Fundamentals of Nanoscale Film Analysis |  | Authors: Terry L. Alford, L.C. Feldman, James W. Mayer Publisher: Springer Category: Book
List Price: $109.00 Buy Used: $37.63 as of 5/22/2012 00:56 CDT details You Save: $71.37 (65%)
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Seller: Textbookpros Sales Rank: 1,743,877
Media: Hardcover Edition: 1 Pages: 350 Number Of Items: 1 Shipping Weight (lbs): 1.6 Dimensions (in): 9.2 x 6.5 x 1
ISBN: 0387292608 Dewey Decimal Number: 621.38152 EAN: 9780387292601 ASIN: 0387292608
Publication Date: February 16, 2007 Availability: Usually ships in 1-2 business days Condition: Book leaves the warehouse the same day we get the order.
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Product Description From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to meet these technological requirements, all based on a few processes that govern the interactions of particles and radiation with matter. This book addresses the fundamentals and application of these processes, from thin films to field effect transistors.
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