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| Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition |  | Author: Marc J. Madou
Publisher: CRC Press
Category: Book
List Price: $133.95
Buy New: $79.00
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Seller: annaqingz
Sales Rank: 266,161
Media: Hardcover
Edition: 2
Pages: 752
Number Of Items: 1
Shipping Weight (lbs): 4.4
Dimensions (in): 11.1 x 8.6 x 1.8
ISBN: 0849308267
Dewey Decimal Number: 621.38152
EAN: 9780849308260
ASIN: 0849308267
Publication Date: March 13, 2002
Availability: Usually ships in 1-2 business days
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Product Description
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.
A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.
Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.
New in the Second Edition
Revised chapters that reflect the many recent advances in the field
Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
Many more links to the Web
Problem sets in each chapter
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