| Cantilever-Based CMOS Sensor Systems |  | Authors: D. Lange, O. Brand, H. Baltes
Publisher: Springer
Category: Book
Buy New: $159.00
as of 5/23/2012 17:58 CDT details
New (1) Used (9) from $88.00
Seller: Amazon.com
Sales Rank: 5,181,466
Media: Hardcover
Edition: 1
Pages: 158
Number Of Items: 1
Shipping Weight (lbs): 0.8
Dimensions (in): 9.5 x 6.3 x 0.5
ISBN: 3540431438
Dewey Decimal Number: 681.413
EAN: 9783540431435
ASIN: 3540431438
Publication Date: September 17, 2002
Availability: Usually ships in 24 hours
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Product Description
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
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